Title of article :
A new intelligent SOFM-based sampling plan for advanced process control
Author/Authors :
Jang-Hee Lee، نويسنده , , Sung Jin You، نويسنده , , Sang-Chan Park، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Keywords :
Self-Organizing Feature Map , neural network , Sampling plan , Process parameter , semiconductor manufacturing , Wafer Bin Map
Journal title :
Expert Systems with Applications
Journal title :
Expert Systems with Applications
