Title of article :
Data mining for yield enhancement in semiconductor manufacturing and an empirical study
Author/Authors :
Chen-Fu Chien، نويسنده , , Wen-Chih Wang، نويسنده , , Jen-Chieh Cheng، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
DATA MINING , Decision tree , Clustering , Defect diagnosis , Yield enhancement , semiconductor manufacturing
Journal title :
Expert Systems with Applications
Journal title :
Expert Systems with Applications
