SiMPl—An avalanche diode array with bulk integrated quench resistors for single photon detection

The so-called silicon photomultipliers (SiPMs, MPPCs, etc.) are already replacing photomultiplier tubes in many applications. Still the reproducibility and the cost requirements are not at the level required for the coverage of many square meters of detector area. Therefore a simple technology is desired which allows a high yield and keeps the detector costs in a reasonable range. In the existing devices the need of high ohmic polysilicon for the quench resistors is one of the most yield and cost driving technological issues. We are proposing a front-side illuminated detector structure with quench resistors integrated into the silicon bulk. In this concept other obstacles for light like metal lines or contacts can be omitted and therefore the fill factor is only limited by the gaps necessary for optical cross-talk suppression. Within the array the entire surface area remains non-structured and can be easily coated with an anti-reflective layer. Compared to existing devices the proposed detector has the potential of higher photon detection efficiency especially in the blue and the UV range, an improved hardness against ionizing radiation and a much simpler processing resulting in a higher production yield and lower costs. The quenching mechanism has been demonstrated in a proof-of-principle production performed in house. The second prototype fabrication on silicon on isolator substrates has been done and allows testing of the device performance. The results from the first measurements are presented.