Author/Authors :
Mingqi، نويسنده , , Cui and Jianwei، نويسنده , , Miao and Jun، نويسنده , , Wang and Yuying، نويسنده , , Huang and Esheng، نويسنده , , Tang and Jinghong، نويسنده , , Shao and Song، نويسنده , , Xue and Zhengliang، نويسنده , , Xu and Jianhui، نويسنده , , Sun، نويسنده ,
Abstract :
A new home-made reflectometer has been installed at Beamline 3B1 of the Beijing Synchrotron Radiation Facility (BSRF). It uses synchrotron radiation as the light source and a multilayer mirror as the monochromator. With this system, the transmission spectrum of an Al film and the soft X-ray reflection spectrum of a NbSi multilayer mirror are obtained. The soft X-ray reflectivity up to 32% of the NbSi multilayer mirror (41 layers, periodic thickness 13.45 nm and wavelength 17.59 nm) is obtained.