Title of article
Preparation of actinide targets by radio-frequency sputtering
Author/Authors
Drapchinsky، نويسنده , , L.V and Shpakov، نويسنده , , V.I، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1995
Pages
4
From page
100
To page
103
Abstract
The preparation of actinide targets by radio-frequency sputtering in Ar is described. Utilizing this method, it was possible to deposit actinide layers onto flat metal disk backings with a high thickness uniformity and a material collection efficiency on the backing of up to 40%.
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Serial Year
1995
Journal title
Nuclear Instruments and Methods in Physics Research Section A
Record number
1995410
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