Author/Authors :
Lee، نويسنده , , Y and Perkins، نويسنده , , L.T and Gough، نويسنده , , R.A and Hoffmann، نويسنده , , M and Kunkel، نويسنده , , W.B and Leung، نويسنده , , K.N and Sarstedt، نويسنده , , M and Vujic، نويسنده , , J and Weber، نويسنده , , M and Williams، نويسنده , , M.D، نويسنده ,
Abstract :
The use of multicusp sources to generate ion beams with narrow energy spread has been investigated. It is found that the presence of a magnetic filter can reduce the longitudinal energy spread significantly. This is achieved by creating a uniform plasma potential distribution in the discharge chamber region, eliminating ion production in the extraction chamber and in the sheath of the exit aperture and by minimizing the probability of charge exchange processes in the extraction chamber. An energy spread as low as 1 eV has been measured.
