Coulomb interactions in a focused ion beam column and design guidelines for an experimental system: comparison of results from MONTEC and BOERSCH

We have made a comparison of the MONTEC® and BOERSCH® codes that are used to determine the space-charge properties of focused beams. The codes were compared by analyzing a focused ion beam system with a liquid metal ion source. The results for the statistical broadening of the ion beam were quite similar, but there were some differences when taking into account global space charge and lens aberrations.