Author/Authors :
Ukibe، نويسنده , , M. and Koyanagi، نويسنده , , M. and Ohkubo، نويسنده , , M. and Pressler، نويسنده , , H. and Kobayashi، نويسنده , , N.، نويسنده ,
Abstract :
We are developing X-ray microcalorimeters using superconducting transition-edge sensors (TESs), which can be operated at relatively high base temperatures of a 3He cryostat. For this purpose, we have selected Ti films to be used as TESs. The Ti films were deposited on different substrates by RF-sputtering. It was found that the superconducting properties of the Ti films depended on Ar pressure, film thickness, and substrate surface roughness.
