Author/Authors :
Wollman، نويسنده , , D.A and Nam، نويسنده , , S.W and Newbury، نويسنده , , D.E and Hilton، نويسنده , , G.C and Irwin، نويسنده , , K.D and Bergren، نويسنده , , N.F and Deiker، نويسنده , , S and Rudman، نويسنده , , D.A and Martinis، نويسنده , , J.M، نويسنده ,
Abstract :
We describe the operation and performance of a prototype microcalorimeter “energy-dispersive” (non-dispersive) X-ray spectrometer (μcal EDS) developed at NIST for use in X-ray microanalysis and X-ray astronomy. The low-energy microcalorimeter detector, consisting of an Al–Ag bilayer superconducting transition-edge sensor (TES) in thermal contact with a Bi X-ray absorber, is designed for operation in the energy range from 0–2 keV and is fabricated using a shadow-mask lithographic process. The TES microcalorimeter is cooled by a compact adiabatic demagnetization refrigerator and is mounted on a scanning electron microscope. This device achieves a best energy resolution of 2.0±0.1 eV at 1.5 keV, as determined from the analysis of digitized X-ray spectra of a complex glass containing many elements.
Keywords :
Cryogenic device , Non-dispersive detector , Energy resolution , X-ray detector , Microcalorimeter , Energy-dispersive spectrometer , Transition-edge sensor , Microcalorimeter EDS , X-ray microanalysis
