Modelling and manufacture of regular microstructures with high aspect ratio in acrylic plastic

The possibility of manufacture of microstructures with high aspect ratio in industrial acrylic plastic by the method of deep X-ray lithography is investigated. A characteristic dependence of the rate of dissolution of the polymer on the dose of the radiation absorbed is obtained. Processing regimes for the formation of deep structures were selected. A model for computation of the profile of development of structures in view of large exhibition depth was suggested. 25×25 μm through channels were obtained in sheet acrylic plastic 1000 μm thick.