Design and fabrication of an active polynomial grating for soft-X-ray monochromators and spectrometers

An active polynomial grating has been designed for use in synchrotron radiation soft-X-ray monochromators and spectrometers. The grating can be dynamically adjusted to obtain the third-order-polynomial surface needed to eliminate the defocus and coma aberrations at any photon energy. Ray-tracing results confirm that a monochromator or spectrometer based on this active grating has nearly no aberration limit to the overall spectral resolution in the entire soft-X-ray region. The grating substrate is made of a precisely milled 17-4 PH stainless steel parallel plate, which is joined to a flexure-hinge bender shaped by wire electrical discharge machining. The substrate is grounded into a concave cylindrical shape with a nominal radius and then polished to achieve a roughness of 0.45 nm and a slope error of 1.2 μrad rms. The long trace profiler measurements show that the active grating can reach the desired third-order polynomial with a high degree of figure accuracy.