Author/Authors :
Hong، نويسنده , , I.-H. and Lee، نويسنده , , T.-H. and Yin، نويسنده , , G.-C. and Wei، نويسنده , , D.-H. and Juang، نويسنده , , J.-M. and Dann، نويسنده , , T.-E. and Klauser، نويسنده , , R. and Chuang، نويسنده , , T.J. and Chen، نويسنده , , C.T. and Tsang، نويسنده , , K.-L.، نويسنده ,
Abstract :
A scanning photoelectron microscope has been constructed at SRRC. This SPEM system consists primarily of a Fresnel zone plate (ZP) with an order-selection aperture, a flexure scanning stage, a hemispherical electron analyzer, and sample/ZP insertion system. The flexure stage is used to scan the sample. A hemispherical analyzer with Omni V lens and a 16-channel multichannel detector (MCD) is used to collect photoelectrons. A set of 16 photoelectron images at different kinetic energies can be simultaneously acquired in one single scan. The data acquisition system is designed to collect up to 32 images concurrently, including 16 MCD signals, total electron yield and transmitted photon flux. The design and some initial test results of this SPEM station are presented and discussed.
Keywords :
Zone plate , Scanning photoelectron microscope , Spectromicroscope , IMAGE
