Author/Authors :
Voronov، نويسنده , , Dmitriy L. and Anderson، نويسنده , , Erik H. and Cambie، نويسنده , , Rossana and Dhuey، نويسنده , , Scott and Gullikson، نويسنده , , Eric M. and Salmassi، نويسنده , , Farhad and Warwick، نويسنده , , Tony and Yashchuk، نويسنده , , Valeriy V. and Padmore، نويسنده , , Howard A.، نويسنده ,
Abstract :
Multilayer-coated blazed gratings with high groove density are the most promising candidates for ultra-high resolution soft X-ray spectroscopy. They combine the ability of blazed gratings to concentrate almost all diffraction energy in a desired high diffraction order with high reflectance soft X-ray multilayers. However in order to realize this potential, the grating fabrication process should provide a near perfect groove profile with an extremely smooth surface of the blazed facets. Here we report on the successful fabrication and testing of ultra-dense saw-tooth substrates with 5000 and 10,000 lines/mm.
Keywords :
Diffraction efficiency , diffraction grating , Blazed grating , E-Beam Lithography , Wet anisotropic etch , EUV , soft x-rays , atomic force microscopy , Multilayer coating
