Title of article :
Process control strategy of the silicon sensors production for the CMS tracker
Author/Authors :
Bergauer، نويسنده , , T and Fontaine، نويسنده , , J.C and Helleboid، نويسنده , , J.M and Krammer، نويسنده , , M and Macchiolo، نويسنده , , A، نويسنده ,
Pages :
5
From page :
218
To page :
222
Abstract :
In the framework of the CMS experiment, a quality control of the silicon sensors production has been developed for the tracker construction. The emphasis here is on the process stability control based on the characterization of test-structures made of eight different components. The measurements carried out are presented. Then the set-up and the software developed for this purpose are explained. The first results, including the ones obtained on faulty batches of sensors, are shown.
Keywords :
Silicon microstrip detectors , CMS , High Energy Physics , quality assurance
Journal title :
Astroparticle Physics
Record number :
2020717
Link To Document :
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