A preferential coating technique for fabricating large, high quality optics

A major challenge facing optic manufacturers is the fabrication of large mirrors (>1 m) with minimal residual slope errors (<0.5 μrad rms). We present a differential coating method with the potential to satisfy such exacting technical demands. Iterative cycles of measurement using the Diamond-NOM, followed by preferential deposition, were performed on a 1200 mm long, silicon mirror. The applied coatings were observed to reduce the optical slope and figure errors from 1.62 to 0.44 μrad rms, and from 208 to 13 nm rms, respectively. It is hoped that this research will lead to commercially available products, of direct benefit to the Synchrotron, Free Electron Laser, Astronomy, Space, and Laser communities, who all require state-of-the-art optics.