Author/Authors :
Qiwen، نويسنده , , Fan، نويسنده ,
Abstract :
High efficiency multi-point evaporation source is very preponderant to prepare deposits of materials with low evaporation temperature. Using this technique materials such as Zn, Cd, Mg, Se, Yb, Sb, Te, etc. can be deposited with the average recovery (K value) of 75% and K value of the average deposition efficiency is about 850 μg/cm2/mg.
Keywords :
high efficiency , Target , Multi-point evaporation source , Low evaporation temperature