Author/Authors :
Nazmov، نويسنده , , V. and Reznikova، نويسنده , , E. and Mathis، نويسنده , , Y.-L. and Mathuni، نويسنده , , J. and Müller، نويسنده , , A. and Rudych، نويسنده , , P. and Last، نويسنده , , A. and Saile، نويسنده , , V.، نويسنده ,
Abstract :
LIGA including deep X-ray lithography has been used to form cross patterns in free-standing foils of different thickness between 20 and 2000 μm. The patterns show bandpass filter behaviors for wavelengths in the 300–800 μm region. Transmittances as high as 99% were achieved, for both, a mercury lamp and the ANKA storage ring in the THz-mode.
Keywords :
bandpass filter , Synchrotron , Terahertz radiation , LIGA microstructures