Nucleation and initial growth processes of diamond thin films for stripper foils

Carbon ion beam stripper foils were fabricated from diamond films synthesized on silicon via chemical vapor deposition. Fine-grained polycrystal diamond foils with decent surface flatness were obtained using a nucleation enhancement pretreatment process. Freestanding diamond foils were formed by etching a portion of the silicon substrate on which the diamond films well-adhered. In preliminary lifetime evaluations, the 1–3 μm-thick diamond foils lasted between 20 and 420 min for 3.2 MeV Ne+ion-beam charge stripping.