Title of article
Instrumental factors in high-resolution FEG STEM
Author/Authors
von Harrach، نويسنده , , H.S.، نويسنده ,
Pages
5
From page
1
To page
5
Abstract
The instrumental factors affecting the resolution of a scanning transmission electron microscope (STEM) differ in many respects from those affecting the transmission electron microscope (TEM). In this note the requirements for reducing the instabilities affecting a scanned electron probe to 10 pm are discussed with reference to a 300 kV field-emission STEM of 0.13 nm resolution.
Journal title
Astroparticle Physics
Record number
2044865
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