Quantitative elemental mapping of materials by energy-filtered imaging

The application of energy-filtered imaging to quantitative elemental mapping of materials is investigated using the newly developed Zeiss 912 TEM. This instrument is equipped with a magnetic omega filtering spectrometer and a slow-scan CCD camera for acquisition of energy-filtered images in digital form suitable for quantitative processing. The high beam current available on this machine permits elemental maps with over one million pixels of data to be acquired in reasonable time. Experimental conditions required for quantitative large-area elemental mapping are described and several approaches to data processing for quantitative analysis are compared. Concentration ratios in a NiCuCr amination catalyst were determined to within 20% accuracy in favorable cases.