Title of article
Effects of incidence angles of ions on the mass resolution of an energy compensated 3D atom probe
Author/Authors
Bémont، نويسنده , , E. and Bostel، نويسنده , , Mustayeen A. and Bouet، نويسنده , , M. and Da Costa، نويسنده , , G. and Chambreland، نويسنده , , S. and Deconihout، نويسنده , , B. and Hono، نويسنده , , K.، نويسنده ,
Pages
8
From page
231
To page
238
Abstract
We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%.
Keywords
3D atom probe , detector , Reflectron lens , Mass resolution , Second-order effects
Journal title
Astroparticle Physics
Record number
2045534
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