Author/Authors :
Bémont، نويسنده , , E. and Bostel، نويسنده , , Mustayeen A. and Bouet، نويسنده , , M. and Da Costa، نويسنده , , G. and Chambreland، نويسنده , , S. and Deconihout، نويسنده , , B. and Hono، نويسنده , , K.، نويسنده ,
Abstract :
We have used a first-order reflectron lens in an optical tomographic atom probe in order to improve the mass resolution. Calculations have been performed to determine the effect of second-order errors in ion energy and incidence angle on the performance of the lens. By applying a correction procedure based on the results of these calculations, we have been able to improve experimental mass resolution by 30%.
Keywords :
3D atom probe , detector , Reflectron lens , Mass resolution , Second-order effects
