Author/Authors :
Su، نويسنده , , D.S. and Wang، نويسنده , , H.F. and Zeitler، نويسنده , , E.، نويسنده ,
Abstract :
Measured atomic ratios show deviations from the stoichiometric ratios that increase with sample thickness. This paper confirms by calculation that plural scattering is responsible for this fact. The dependence on the experimental parameters like energy window and collection aperture becomes obvious. Attempts are made to provide numerical correction factors which allow more reliable EELS determination also for thick samples.
