Visualization of latent images by reflection near field optical microscopy
Author/Authors :
O. Bergossi، نويسنده , , O. and Spajer، نويسنده , , M. and Schiavone، نويسنده , , P.، نويسنده ,
Pages :
6
From page :
241
To page :
246
Abstract :
Near field reflection imaging on non-developed photoresists is achieved using a dielectric probe. Preliminary results demonstrate a subwavelength resolution uncorrelated with topographic image and a contrast related to the index change integrated on the layer thickness.
