Title of article :
Environmental sensors based on micromachined cantilevers with integrated read-out
Author/Authors :
Boisen، نويسنده , , A and Thaysen، نويسنده , , J and Jensenius، نويسنده , , H and Hansen، نويسنده , , O، نويسنده ,
Abstract :
An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid. The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water.
Keywords :
Humidity sensor , Alcohol sensor in water , Symmetrical Wheatstone bridge , thermal sensor , atomic force microscopy , probe , Cantilever based sensor , piezoresistive , Integrated read-out
Journal title :
Astroparticle Physics
