Author/Authors :
Sawada، نويسنده , , H. and Sannomiya، نويسنده , , T. and Hosokawa، نويسنده , , F. and Nakamichi، نويسنده , , T. and Kaneyama، نويسنده , , T. and Tomita، نويسنده , , T. and Kondo، نويسنده , , Y. and Tanaka، نويسنده , , T. and Oshima، نويسنده , , Y. and Tanishiro، نويسنده , , Y. and Takayanagi، نويسنده , , K.، نويسنده ,
Abstract :
Aberrations up to the fifth-order were successfully measured using an autocorrelation function of the segmental areas of a Ronchigram. The method applied to aberration measurement in a newly developed 300 kV microscope that is equipped with a spherical aberration corrector for probe-forming systems. The experimental Ronchigram agreed well with the simulated Ronchigram that was calculated by using the measured aberrations. The Ronchigram had an infinite magnification area with a half-angle of 50 mrad, corresponding to the convergence angle of a uniform phase.
Keywords :
Ronchigram , Autocorrelation function , Aberration , Astigmatism , Spherical aberration correction , Scanning electron microscope
