Author/Authors :
Sawada، نويسنده , , H. and Sasaki، نويسنده , , T. and Hosokawa، نويسنده , , F. and Yuasa، نويسنده , , S. and Terao، نويسنده , , M. and Kawazoe، نويسنده , , M. and Nakamichi، نويسنده , , T. and Kaneyama، نويسنده , , T. and Kondo، نويسنده , , Y. and Kimoto، نويسنده , , K. and Suenaga، نويسنده , , K.، نويسنده ,
Abstract :
We developed a new electron optical system with three dodecapoles to compensate for spherical aberration and six-fold astigmatism, which generally remains in a two-hexapole type corrector. In this study, we applied the corrector for image-forming system in transmission electron microscope. Compensation for higher-order aberration was demonstrated through a diffractogram tableau using a triple three-fold astigmatism field system, which was then compared with a double hexapole field system. Using this electron optical system, six-fold astigmatism was measured to be less than 0.1 mm at an acceleration voltage of 60 kV, showing that the system successfully compensated for six-fold astigmatism.
