Influence of different hydrocarbons on the structure of CVD- and PACVD-TiCx hard layers

The structure of CVD-TiCx hard layers is determined, to a large degree, by the type of hydrocarbon used. Using unsaturated hydrocarbons (benzene, xylene, ethylbenzene) the layers have a 〈111〉-texture, and the crystallites show a high dislocation density, whereas using saturated hydrocarbons (n-heptane, cycloheptane) a 〈200〉-texture can be observed and the crystallites are nearly dislocation-free. It is possible by a periodical swapping of two different hydrocarbons (unsaturated/saturated) to deposit a multilayer system with a textureless structure and high wear resistance.