Author/Authors :
Bhattacharya، نويسنده , , K and DeSimone، نويسنده , , A and Hane، نويسنده , , K.F and James، نويسنده , , R.D and Palmstrّm، نويسنده , , C.J، نويسنده ,
Abstract :
In this paper we outline a strategy for producing certain deformable structures — tents and tunnels — on epitaxially grown martensitic single crystal films. These structures are intended to be the basic building blocks of micropumps and microactuators. We give specific predictions for the systems Ni2MnGa, PbTiO3 and CuZnAl.
Keywords :
MEMS , Shape-memory alloys , Ferromagnetic shape-memory alloys , thin-films , micropumps , Ferroelectrics
