Determination of auger-sensitivity-factors in Zn1 − xMgxTe for quantitaitve surface analysis

We investigated the ternary II–VI compound semiconductor Zr1 − xMgxTe, where the range of x was between 0 (in the case of pure ZnTe) and 1 (in the case of pure MgTe). Emphasis was put on the behaviour of the sensitivity factor σ of the various elements as a function of x. These sensitivity factors were calculated using a new theoretical approach. We found a strong dependence of the sensitivity factors on the compound composition. In the case of Te we also observed a change in the line shape in the Auger spectrum and the appearance of Coster-Kronig transitions.