Author/Authors :
Boudiombo، نويسنده , , J. and Baehr، نويسنده , , O. and Boudrioua، نويسنده , , A. and Thevenin، نويسنده , , P. and Loulergue، نويسنده , , J.C. and Bath، نويسنده , , A.، نويسنده ,
Abstract :
Waveguide films of boron nitride are fabricated by a plasma enhanced chemical vapor deposition (PECVD) process. Optical properties of films are investigated. Effective refractive indices of guided modes are used to determine refractive index and film thickness. A good optical quality has been obtained with an hexagonal structure.
