Title of article
Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor
Author/Authors
Garibin، نويسنده , , E.A. and Mironov، نويسنده , , I.A. and Khoruzhnikov، نويسنده , , S.E. and Vorobʹev، نويسنده , , A.N.، نويسنده ,
Pages
7
From page
8
To page
14
Abstract
The chemical vapour deposition of polycrystalline zinc selenide in a vertical rectangular reactor is numerically simulated on the basis of the three-dimensional transport equations for low Mach number flows. The results obtained suggest two different regimes of mass transfer. The influence of carrier gas flow rate on the process efficiency and the uniformity of deposited layers is analysed.
Keywords
chemical vapour deposition , Zinc selenide , Gasdynamics
Journal title
Astroparticle Physics
Record number
2065597
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