Title of article :
Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE
Author/Authors :
Turkovi?، نويسنده , , A، نويسنده ,
Abstract :
Titanium dioxide films on glass substrate were obtained by the atomic layer epitaxy (ALE) method. The average grain radius 〈R〉, obtained by grazing-incidence small-angle X-ray scattering (GISAXS), was 13.6±2.3 nm. The average grain size 〈R〉 of 14.1±2.1 nm obtained by grazing-incidence wide-angle X-ray diffraction (GIWAXD) agrees with GISAXS values. The fractal nature of these samples is analyzed.
Keywords :
Grazing-incidence small-angle X-ray scattering , Atomic layer epitaxy , Grazing-incidence wide-angle X-ray diffraction , Titanium dioxide
Journal title :
Astroparticle Physics
