Author/Authors :
Trigaud، نويسنده , , T and Aubry، نويسنده , , C and Chiron، نويسنده , , D and Moliton، نويسنده , , J.P and Colombeau، نويسنده , , B، نويسنده ,
Abstract :
Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage with energetic ions (E>50 keV). As ion bombarded polymers show losses higher than 2.3 db/cm, the choice has been made to elaborate salient guides of virgin 6FDA-ODA. The fabrication conditions are presented. We then discuss about the wave-guiding properties of the polymer structures.
Keywords :
Shrinkage , ion irradiation , Optical guide , 6FDA-ODA polyimide
