Title of article :
Optical waveguides etched in 6FDA-ODA by focused ion beam
Author/Authors :
Chiron، نويسنده , , D. and Trigaud، نويسنده , , T. and Moliton، نويسنده , , J.P.، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 2001
Abstract :
Here is described a dry process to etch optical waveguides in polymers without geometric defect of the guiding structure. The dimensions are optimized for wavelengths of around 1.5 μm used in telecommunications. The implementation of focused ion beam (FIB
Keywords :
6FDA-ODA polyimide , FIB , Optical waveguide , Nanometric etching
Journal title :
Synthetic Metals
Journal title :
Synthetic Metals
