Inorganic sensors utilizing MEMS and microelectronic technologies

The most significant recent advances in achieving sensor sensitivity and selectivity has been tied to the integration of thin film sensors with micromachined and/or microelectronic technologies. Arrays of micro-hotplates, microcantilever beams and metal oxide semiconductor devices show great promise as chemical sensor platforms exhibiting enhanced selectivity and markedly reduced power dissipation. Microcantilever beams, presently under development, demonstrate exceptional sensitivity for thermal, optical and magnetic stimuli.