Title of article
Electrochemical metal deposition on silicon
Author/Authors
Ogata، نويسنده , , Yukio H. and Kobayashi، نويسنده , , Katsutoshi and Motoyama، نويسنده , , Munekazu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2006
Pages
10
From page
163
To page
172
Abstract
Electrochemical metal deposition is utilized to fabricate micro- and nano-structures. A variety of the structures have been achieved in metal patterning and structuring and also in the structure formation of silicon itself. The controlling factors and conditions of the size, morphology and distribution have been investigated. The importance of metal deposition by displacement reaction should be recognized.
Keywords
Electrodeposition of metal , Micro- and nano-structure formation , Displacement deposition , Silicon , Porous silicon
Journal title
Current Opinion in Solid State and Materials Science
Serial Year
2006
Journal title
Current Opinion in Solid State and Materials Science
Record number
2089107
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