Title of article
Automated inspection of IC wafer contamination
Author/Authors
Reza Aghaeizadeh Zoroofi، نويسنده , , Hisashi Taketani، نويسنده , , Shinichi Tamura، نويسنده , , Yoshinobu Sato، نويسنده , , Kazuma Sekiya، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
11
From page
1307
To page
1317
Keywords
Neural networks , Contamination classification , Optical filtering , Minimum distance algorithm , Maximum likelihood classifier , IC wafer inspection , Industrial automation
Journal title
PATTERN RECOGNITION
Serial Year
2001
Journal title
PATTERN RECOGNITION
Record number
209185
Link To Document