Title of article
Growth and characterization of diamond film on aluminum nitride
Author/Authors
Cui، نويسنده , , J.B. and Ma، نويسنده , , Y.R and Zhang، نويسنده , , J.F. and Chen، نويسنده , , H. and Fang، نويسنده , , R.C.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1996
Pages
5
From page
781
To page
785
Abstract
Diamond films have been fabricated on aluminum nitride (AlN) ceramics by hot filament (HFCVD) method. High nucleation density of more than 109/cm2 can be obtained on AlN wafers by the pre-irradiation of high temperature filament in the hydrogen atmosphere. Thermal properties of the composites were measured by using photothermal deflection techniques (PTD). Thermal diffusivity of diamond film/AlN depends on the quality and thickness of coated diamond films.
Keywords
A. Composites , B. vapor deposition , D. Thermal conductivity
Journal title
Materials Research Bulletin
Serial Year
1996
Journal title
Materials Research Bulletin
Record number
2093211
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