Properties of polycrystalline SrRuO3 thin films on Si substrates

The perovskite SrRuO3 thin films were deposited on Si(100) substrates using pulsed laser deposition. These thin films had columnar structures and exhibited good surface morphology and good barrier characteristics for Si. The films exhibited metallic conductivities, with a room temperature resistivity of 529 μΩ · cm. These thin films can be useful in many applications, such as electrodes for ferroelectric and electro-optic devices.