Title of article :
Low-dielectric constant material—Synthesis and applications in microelectronics (MRS Symp. Proc. vol. 381): Edited by T.-M. Lu, S.P. Murarka, T.-S. Kuan and C.H. Ting. Materials Research Society, Pittsburgh, PA, 1995, 288 pages, hardback, $72 MRS member;
Author/Authors :
Sleight، نويسنده , , A.W.، نويسنده ,
