Possibilities of aerosol technology for deposition of SnO2-based films with improved gas sensing characteristics

Advantages of aerosol technology for deposition of nano-scaled (5–50 nm) undoped and Pd-doped metal oxide films for gas sensor applications are discussed in this report. Using SnO2-based film deposition as a case study, it has been shown that this technology has great potential for controlling the structure, the electrophysical, and gas sensing properties of metal oxides.