Free-standing semiconductor micro- and nano-objects

Strained semiconductor bilayers are released from their substrate and formed into free-standing micro- and nano-objects (MNOs) on semiconductor substrates. We fabricate ultrathin SiGe ring-like vertical membranes and investigated their formation process. The rings experience excellent circular shape and can move to a different position on the substrate surface without breaking. The diameter of In0.33Ga0.67As/GaAs tubes is systematically studied as a function of the bilayer thickness. An entirely free-standing InGaAs/GaAs tube is created.