Study of AlxGa1−xAs/GaAs heterostructures by M-M EPES method

Low aluminum composition x, in a series of AlxGa1−xAs samples, has been investigated by the multi-mode elastic peak electron spectroscopy (M-M EPES). This spectroscopy is a non-destructive method, and is very sensitive to the surface sample. Indeed, all electrons are elastically reflected from the first overlayers of the substrate (J. Surf. Anal. 5 (1) (1999) 90). Measurements of the percentage of the reflected current are depending on different parameters such as the atomic number of the substrate, the primary electron beam energy (Surf. Interface Anal. 30 (2000) 341). The EPES results must be associated to a Monte Carlo program for efficient sample interpretation. al of this paper is to report that the Monte Carlo model, based on a realistic description of the GaAs and AlAs materials and their surface regions allowed us to explain the EPES measurements in ternary AlxGa1−xAs alloys when the aluminum composition is changed.