Directly patternable SnO2 thin films incorporating Pt nanoparticles

Direct-patterning of SnO2 films incorporating Pt nanoparticles was performed by using a photochemical solution deposition without a photoresist or dry etching. Incorporating Pt nanoparticles into these films had a slight effect on their crystallinity and almost no effect on their transmittance. The inclusion of Pt nanoparticles enhanced the electrical conductivity of the SnO2 thin films compared to their pristine forms. The chemical bonding state of the films was analyzed by X-ray photoelectron spectroscopy to investigate the effect of the Pt nanoparticles on the carrier concentration in the film. It was concluded that the reduction of SnO2 thin films by Pt nanoparticles progressed as a result of the presence of the Pt nanoparticles, causing an oxygen deficiency to develop in SnO2 and thereby influencing the carrier concentration of the film.