Investigation of porosity and fractal properties of the pyrolytic MnO2 films in the capacitor structure

The cathode of solid metal oxide-semiconductor capacitors is considered as the semiconductor, MnO2, obtained by means of impregnation of the anode with Mn(NO3)2 solutions within pyrolytic decomposition. Stability range of capacitor structure is mainly determined by the amount of water contained by manganese dioxide, which ensure compaction of contacts between capacitors due to packing of cavities in MnO2, i.e. depends on open porosity of pyrolytic layer. At the same time it is known that the whole range of differently characterized microporous objects display their fractal properties. Taking all this into account the present paper is concerned on investigation of microporosity and fractal properties of pyrolytic MnO2 films by small-angle X-ray scattering method. It has been determined that the major contribution to the submicropores volume concentration is made by submicropores not exceeding 8 nm. The MnO2 layers are fractal structures with the value of volume fractal dimension D = 2.87.