Title of article
Modes of propagating light waves in thin films of boron nitride deposited by plasma enhanced chemical vapor deposition
Author/Authors
Boudiombo، نويسنده , , J. and Baehr، نويسنده , , O. and Boudrioua، نويسنده , , A. and Thevenin، نويسنده , , P. and Loulergue، نويسنده , , J.C. and Bath، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
3
From page
96
To page
98
Abstract
Waveguide films of boron nitride are fabricated by a plasma enhanced chemical vapor deposition (PECVD) process. Optical properties of films are investigated. Effective refractive indices of guided modes are used to determine refractive index and film thickness. A good optical quality has been obtained with an hexagonal structure.
Keywords
Refractive index , waveguides , bandgap
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1997
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2132333
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