Title of article
Investigations of diamond-like carbon films produced directly from an ion beam of industrial ion source with a cold cathode
Author/Authors
Enisherlova، نويسنده , , K.L. and Kontsevoi، نويسنده , , Yu.A. and Chervyakova، نويسنده , , E.N. and Mitrofanov، نويسنده , , E.A. and Maishev، نويسنده , , Yu.P.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
4
From page
137
To page
140
Abstract
Experiments have been carried out on an industrial multifunctional ion-beam treatment system ‘Kashtan’ equipped as an ion source with a cold cathode ‘Radical-M’. DLC films have been produced from ion beams of CH4 and C6H12. The composition, structure, mechanical, optical and electrophysical properties of these films have been investigated. The technology of DLC films of 2.0 μm thickness deposited on GaAs wafers has been developed.
Keywords
Cold Cathode , Diamond-like carbon films , Ion Beam
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1997
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2132343
Link To Document