Title of article :
Control of SiC growth and graphitization in sublimation sandwich system
Author/Authors :
Karpova، نويسنده , , S.Yu. and Makarov، نويسنده , , Yu.N. and Ramm، نويسنده , , M.S. and Talalaev، نويسنده , , R.A.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Abstract :
A theoretical approach is proposed which combines a mathematical model of SiC growth by the sublimation sandwich method with analysis of excess phases formation during the growth. This allows the prediction of the geometrical parameters of the sandwich cell and the process conditions resulting in the growth of single crystalline SiC without graphitization. Comparison of the theoretical results with experimental observations is shown.
Keywords :
Graphitization , SiC , sublimation growth
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Journal title :
MATERIALS SCIENCE & ENGINEERING: B