Title of article
Numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films
Author/Authors
Vorobʹev، نويسنده , , A.N. and Garibin، نويسنده , , E.A. and Khoruzhnikov، نويسنده , , S.E. and Mironov، نويسنده , , I.A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1997
Pages
6
From page
204
To page
209
Abstract
The numerical study and optimization of chemical vapor deposition process in fabricating zinc selenide films were carried out on the basis of the three-dimensional transport equations for low Mach number flows. The optimization technics was developed and the optimum regimes were found.
Keywords
chemical vapor deposition , optimization , Zinc selenide
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
1997
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2132508
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