Formation and thermal stability of amorphous Ti-Si-C alloys

The crystallization behavior of Ti-Si-C ternary amorphous alloys sputtered in low-pressure argon was investigated by measuring differential scanning calorimetry (DSC) curves. The crystallized microstructures of Ti-Si-C amorphous alloys were observed by in-situ heating in a hot stage of an electron microscope. Ti-46at%Si-32at.%C amorphous alloy crystallizes to fine grains composed of β-SiC and TiSi2. Ti-14at.%Si-20at.%C amorphous alloy crystallizes to fine grains composed of TiC and Ti5Si3. Although the carbon improves the thermal stability of the Ti-Si-C ternary alloys, the silicon degrades the thermal stability of the alloys. The amorphous alloys containing compositions corresponding to carbosilicide or carbide such as Ti5Si3Cx, Ti3SiC2 or SiC possess high thermal stability and high hardness values.